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Guide to Hands-on MEMS Design and Prototyping
Joel A. Kubby
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Description for Guide to Hands-on MEMS Design and Prototyping
paperback. Get the hands-on experience needed to design, fabricate and test MEMS devices with this practical guide for students and professionals. Num Pages: 178 pages, 132 b/w illus. 1 table 33 exercises. BIC Classification: TJFN; TJKW. Category: (P) Professional & Vocational. Dimension: 229 x 154 x 10. Weight in Grams: 320.
Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing ... Read more
Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing ... Read more
Product Details
Format
Paperback
Publication date
2011
Publisher
Cambridge University Press United Kingdom
Number of pages
178
Condition
New
Number of Pages
178
Place of Publication
Cambridge, United Kingdom
ISBN
9781107645790
SKU
V9781107645790
Shipping Time
Usually ships in 7 to 11 working days
Ref
99-32
About Joel A. Kubby
Joel Kubby is a Professor of Electrical Engineering in the Baskin School of Engineering at the University of California, Santa Cruz. Prior to this, he was an Area Manager with the Xerox Wilson Center for Research and Technology and a Member of Technical Staff at the Webster Research Center in Rochester, New York. He has led a six-company industrial research ... Read more
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