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Wafer Manufacturing: Shaping of Single Crystal Silicon Wafers
Imin Kao
€ 129.63
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Description for Wafer Manufacturing: Shaping of Single Crystal Silicon Wafers
Hardcover. Presenting all the major stages in wafer manufacturing, from crystals to prime wafers. This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. Num Pages: 336 pages. BIC Classification: TJFD5. Category: (P) Professional & Vocational. Dimension: 244 x 170. .
Presenting all the major stages in wafer manufacturing, from crystals to prime wafers.
This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.
Product Details
Format
Hardback
Publication date
2021
Publisher
John Wiley and Sons Ltd United States
Number of pages
336
Condition
New
Number of Pages
304
Place of Publication
New York, United States
ISBN
9780470061213
SKU
V9780470061213
Shipping Time
Usually ships in 7 to 11 working days
Ref
99-50
About Imin Kao
Imin Kao, is Professor in the Department of Mechanical Engineering at the State University of New York in Stony Brook, USA. He is Faculty Director of the Undergraduate College in Information and Technology Studies. He holds three patents, and his research foci include robotic manipulation with soft contacts and smart contact surface technology using MEMS. Chunhui Chung, is ... Read more
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