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Spectroscopic Ellipsometry and Reflectometry
Harland G. Tompkins
€ 191.66
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Description for Spectroscopic Ellipsometry and Reflectometry
Hardcover. While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. Num Pages: 248 pages, Illustrations. BIC Classification: PHJ; TGM. Category: (P) Professional & Vocational; (UP) Postgraduate, Research & Scholarly; (UU) Undergraduate. Dimension: 163 x 237 x 19. Weight in Grams: 516.
While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.
While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.
Product Details
Format
Hardback
Publication date
1999
Publisher
John Wiley & Sons Inc United States
Number of pages
248
Condition
New
Number of Pages
248
Place of Publication
, United States
ISBN
9780471181729
SKU
V9780471181729
Shipping Time
Usually ships in 7 to 11 working days
Ref
99-50
About Harland G. Tompkins
Harland Tompkins retired from full-time employment in 2001. During his full-time employment, he was employed by General Electric Co., Bell Laboratories, the Idaho National Engineering Lab, and Motorola. William A. McGahan is the author of Spectroscopic Ellipsometry and Reflectometry: A User's Guide, published by Wiley.
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